Sampling Theory in Practical Applications
Akira Hirabayashi, Yamaguchi University, Japan

Seminar • 02 June 2003

More Info ...Abstract
Sampling theory provides a basis of signal processing by digital computational engines. Appropriate usage of the theory gives rise to significant benefits to practical applications. One of such examples is seen in white-light interferometry, a technique for testing micrometer-ordered surface configurations of objects such as semiconductors or liquid crystal displays. Conventional algorithms use digital signal processing techniques as merely approximations of continuous signal processing. They require narrow sampling intervals in order to achieve good approximation accuracy. In contrast, we devised a new algorithm based on the sampling theory, and extended sampling interval to 6-14 times wider than those used in conventional algorithms. The new algorithm has been installed in a commercial system that achieved the world's fastest vertical scanning speed. Some further topics about sampling theory in other applications will also be presented.